EMS TURBO SPUTTER PDF

The EMS R T is a large chamber, rotary-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8″/ mm (e.g. a wafer). The EMST S Plus is a high resolution sputter coater for oxidizing and non- oxidizing The EMS T Plus product line is a compact turbomolecular- pumped. EMS T Turbo-Pumped Sputter Coater/Carbon Coater. The EMST is a compact turbomolecular- pumped coating system suitable for SEM,. TEM and many.

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SC ‘Mini’ Sputter Coater. Film Thickness Monitor Tilt and height can be pre-set. Includes gear box to allow optional FTM to be used.

The EMS T T Plus can be fitted with an optional film thickness monitor FTMwhich measures the coating tirbo on a quartz crystal monitor within the chamber, in order to control the coating thickness of material deposited on to the sample. Two-year spares kit for QT E Plus.

Turbo-Pumped Sputter Coater, EMST S – Science Services

sputtet The KXD was a compact, dual head turbomolecular-pumped sputter coater optimised to deposit fine metal coatings for SEM, FEG-SEM and thin film applications – allowing sequential sputtering of two metals without the need to break vacuum.

Carbon rod evaporation head insert for 6.

Sputter coating is a technique widely used in various applications; it is possible to create a plasma and sputter metals with high voltage, turbi vacuum and no automation. Toggle navigation Quorum Technologies. Shields can be fitted to protect large surfaces from coating deposition — easily removable for ease of cleaning. R S and R ES versions only.

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Has six stub positions for 15 mm or 6. With the high-quality vacuum system the EMS T D Plus is also capable of using oxidizing metal targets such as chromium Cr and Aluminum Al to produce fine films and coatings. Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples. The e-stop can be retrofitted to existing systems.

Turbo-Pumped Sputter and Carbon Coater

This stage only rotates and has no tilt or height adjustment. A flat adjustable stage capable of accepting either 4″ or 6″ wafers is mounted on a swinging arm stage, which rotates the stage under the targets to optimise coating.

Rotation speed is variable between rpm. Hydraulically-formed bellows stainless-steel backing line. Tall chamber option is available for improved uniformity for sputtering and to hold larger substrates.

The EMS T D Plus uses low temperature enhanced-plasma magnetrons optimized for the turbomolecular pump pressures, combined with low current and deposition control, which ensures your substrate is protected and uniformly turho.

Variable tilt angle, rotary planetary specimen stage, 50mm diameter rotational speed rpm. For example, the EMS T D Plus can automatically terminate a coating sms when the required thickness has been achieved.

For replacement targets see: A “dry” alternative to the standard oil-based rotary pump complete with vacuum hose, coupling kit and oil mist filter.

A lockable emergency stop e-stop switch which can be mounted on top of the system in a position easily accessible for the operator. A large multi-color status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance. E ‘Cool’ Sputter Coater.

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The maximum sputtering time is 60 minutes without breaking vacuum and with automatically built-in cooling periods.

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In addition a flat, adjustable stage capable of accepting 4″ The platform has six specimen stub positions for 6. Automatic vacuum control which can be pre-programmed to suit the process and material, therefore removing the need for manual intervention or control.

The deposition heads can be swapped in seconds and the intelligent system logic automatically recognises which head is in place and displays the appropriate operating settings. Rotating vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS T Plus when bench depth is limited. Carbon rods – 6. Extended height vacuum chamber. These products are for Research Use Only.

However, some metals require the use of a molybdenum boat, which can also be used for heat-cleaning SEM and TEM apertures. A large multi-color status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance. Rotation Speed Max 38 turb Min 14 sputtef. The unique loading rack out drawer system gives the user easy sample access with good sample size and the hinged lid assembly makes any other areas of the system readily accessible.

Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use.